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Design of clean rooms used in the manufacturing of semiconductors.

Reinraumkonzepte für die Halbleiterfertigung.

Author(s) : RENZ M.

Type of excerpt: Book chapter

Summary

The author presents air circuit design suitable for clean rooms used in the manufacturing of superconductors. Plans show filter, ventilation, air distribution and inlet locations in classic existing systems and the proposed design. The latter also takes into account ultra-clean mini-environments in certain zones requiring such conditions and enables a reduction in treated air flow.

Details

  • Original title: Reinraumkonzepte für die Halbleiterfertigung.
  • Record ID : 2000-0972
  • Languages: German
  • Source: Festschrift zum 60. Geburtstag von Prof. Dr.-Ing. Fritz Steimle.
  • Publication date: 1998/09/04
  • Document available for consultation in the library of the IIR headquarters only.

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