ShareDUST IN CLEAN ROOMS.
Author(s) : ZHAO R. Y., QIAN P. N., XU W. Q.
Summary
A CLOSE ATTENTION HAS BEEN PAID TO DUST CONTAMINATION IN CLEAN ROOMS FOR DEVELOPING SEMICONDUCTOR INDUSTRY AND HIGH-TECH SINCE 1960S. WITH INCREASING THE PRODUCT QUALITY AND RELIABILITY, DUST CONTAMINATION THAT CAN CAUSE DAMAGE OR BREAKDOWN IN ELEMENTS AND ASSEMBLIES OF PRODUCTS MUST BE CAREFULLY CONTROLLED. THEREFORE CLASS 1 AND CLASS 10 HAVE BEEN ADDED IN NEW PUBLISHED FEDERAL STANDARD 209D AND THE PARTICLE DIAMETER IS EXTENDED TO 0. 1 MICROMETER.
Details
- Original title: DUST IN CLEAN ROOMS.
- Record ID : 1990-2072
- Languages: English
- Publication date: 1989/08/01
- Source: Source: CLIMA 2000, Sarajevo
vol. 3; 152-156; 1 fig.; 4 ref. - Document available for consultation in the library of the IIR headquarters only.
Indexing
- Themes: Air conditioning in laboratories and industry
- Keywords: Regulations; Electronics; China; Clean room; Filtration; Air conditioning
-
CLEAN ROOMS: A USER'S VIEW.
- Author(s) : LAMBERT R. D.
- Date : 1986/01/29
- Languages : English
View record
-
Comparison of different instruments for particl...
- Author(s) : WANG X. L., ZHANG Y. H., TAN Z. C.
- Date : 2005
- Languages : English
- Source: ASHRAE Transactions. 2005 Annual Meeting, Denver, Colorado, USA. Volume 111, part 2 + CD-ROM.
View record
-
Le cas particulier des salles blanches.
- Author(s) : BRESIN S.
- Date : 1996/06/27
- Languages : French
- Source: Le conditionnement d'ambiance en industrie agroalimentaire.
View record
-
ADVANCED ANALYSIS TECHNIQUES FOR THE DESIGN OF ...
- Author(s) : BROYD T. W., MALAM D.
- Date : 1986/01/29
- Languages : English
View record
-
Energy-efficiency strategies for clean rooms wi...
- Author(s) : TSCHUDI W., FAULKNER D., HEBERT A.
- Date : 2005
- Languages : English
- Source: ASHRAE Transactions. 2005 Annual Meeting, Denver, Colorado, USA. Volume 111, part 2 + CD-ROM.
View record