CLEAN ROOMS: A USER'S VIEW.
Author(s) : LAMBERT R. D.
Summary
HIGHLIGHTS SOME OF THE OPERATIONAL PROBLEMS ASSOCIATED WITH LOCATING PEOPLE, PLANT AND MACHINERY WITHIN THE CONFINES OF A CLEAN ROOM. CONCENTRATES ON THE MICROELECTRONICS INDUSTRY. PROVIDES A PRACTICAL DISCUSSION BASED ON PERSONAL EXPERIENCE OF THE CONSTRUCTION AND EQUIPPING OF MOTOROLA LATEST MO FABRICATION PLANT. (INT. BUILD. SERV. ABSTR., GB., 22, N 2, 1987, 29, 87-00645.
Details
- Original title: CLEAN ROOMS: A USER'S VIEW.
- Record ID : 1987-2363
- Languages: English
- Publication date: 1986/01/29
- Source: Source: Inst. mech. Eng., Semin. clean Room Des., London
45-50; 3 fig. - Document available for consultation in the library of the IIR headquarters only.
Indexing
- Themes: Air conditioning in laboratories and industry
- Keywords: Electronics; Clean room; Air conditioning
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- Author(s) : GUICCIARDI F.
- Date : 1990/03
- Languages : Italian
- Source: Cond. Aria - vol. 34 - n. 3
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- Author(s) : BRINGMANN A., GASSER F.
- Date : 1989
- Languages : French
- Source: Rev. tech. Sulzer - Sulzer tech. Rev. - vol. 71 - n. 4
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BUILDINGS FOR MICROELECTRONIC MANUFACTURING WIT...
- Author(s) : GRÄBER H. G.
- Date : 1990
- Languages : German
- Source: Klima Kälte Heiz. - vol. 18 - n. 6
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Microélectronique : des technologies très pouss...
- Author(s) : FOURRET M.
- Date : 2003/05
- Languages : French
- Source: CLIM Prat. - n. 55
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DE L'INVISIBLE A L'INDICIBLE. LES CONDITIONS DE...
- Author(s) : DONIOL-SHAW G.
- Date : 1990
- Languages : French
- Source: CNRS-IRESCO-GEDISST - 1990; fig.; ref.
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