ShareExperimental and numerical results for airflow and particle transport in a microelectronics clean room.
Author(s) : KUEHN T. H., PUI D. Y. H., GRATZEK J. P.
Summary
The paper presents experimental measurements of time-averaged air velocities, turbulence intensity, and turbulent frequency distribution near an exhaust bench located in a Class 10 side-wall exhaust, tunnel-type clean room. There is a good agreement between the measured and computed velocity results, but the particle concentration agreement is not as good.
Details
- Original title: Experimental and numerical results for airflow and particle transport in a microelectronics clean room.
- Record ID : 1993-2203
- Languages: English
- Publication date: 1992
- Source: Source: ASHRAE Trans.
vol. 98; n. 1; 940-950; 13 fig.; 8 tabl.; 5 ref.; discuss. - Document available for consultation in the library of the IIR headquarters only.
Indexing
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CLEAN ROOM AND PARTICLE DEPOSITS.
- Author(s) : FUJII S., XIE G.
- Date : 1991
- Languages : Japanese
- Source: SHASE - vol. 65 - n. 9
View record
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Air velocity characteristics in a clean room.
- Author(s) : HU S. C., LIU C. J., WU Y. Y., CHAO C. H.
- Date : 1996/07
- Languages : English
- Source: AIRAH J. - vol. 50 - n. 7
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Comparison of different instruments for particl...
- Author(s) : WANG X. L., ZHANG Y. H., TAN Z. C.
- Date : 2005
- Languages : English
- Source: ASHRAE Transactions. 2005 Annual Meeting, Denver, Colorado, USA. Volume 111, part 2 + CD-ROM.
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CLEAN ROOMS: A USER'S VIEW.
- Author(s) : LAMBERT R. D.
- Date : 1986/01/29
- Languages : English
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Particle measurement technology.
- Author(s) : ICHIJO K.
- Date : 2008/11
- Languages : Japanese
- Source: Refrigeration - vol. 83 - n. 973
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