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Experimental and numerical results for airflow and particle transport in a microelectronics clean room.

Author(s) : KUEHN T. H., PUI D. Y. H., GRATZEK J. P.

Summary

The paper presents experimental measurements of time-averaged air velocities, turbulence intensity, and turbulent frequency distribution near an exhaust bench located in a Class 10 side-wall exhaust, tunnel-type clean room. There is a good agreement between the measured and computed velocity results, but the particle concentration agreement is not as good.

Details

  • Original title: Experimental and numerical results for airflow and particle transport in a microelectronics clean room.
  • Record ID : 1993-2203
  • Languages: English
  • Publication date: 1992
  • Source: Source: ASHRAE Trans.
    vol. 98; n. 1; 940-950; 13 fig.; 8 tabl.; 5 ref.; discuss.
  • Document available for consultation in the library of the IIR headquarters only.

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