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Low temperature ion source.

Author(s) : TANABE S., TONEGAWA A., TAKAYAMA K.

Summary

A low temperature ion source has been developed to produce a plasma with a low ion temperature and a high plasma density by using a gas contact technique. This ion source is a hybrid type consisting of modified plasma compression type cylindrical hollow cathode plasma source and the gas contact chamber with floating potential mounted on the head of the anode.

Details

  • Original title: Low temperature ion source.
  • Record ID : 1995-0036
  • Languages: English
  • Source: Proceedings of the 5th International Conference on ion sources.
  • Publication date: 1993/08
  • Document available for consultation in the library of the IIR headquarters only.

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