ShareLow temperature ion source.
Author(s) : TANABE S., TONEGAWA A., TAKAYAMA K.
Summary
A low temperature ion source has been developed to produce a plasma with a low ion temperature and a high plasma density by using a gas contact technique. This ion source is a hybrid type consisting of modified plasma compression type cylindrical hollow cathode plasma source and the gas contact chamber with floating potential mounted on the head of the anode.
Details
- Original title: Low temperature ion source.
- Record ID : 1995-0036
- Languages: English
- Source: Proceedings of the 5th International Conference on ion sources.
- Publication date: 1993/08
- Document available for consultation in the library of the IIR headquarters only.
Links
See the conference proceedings
Indexing
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Electron cyclotron resonance (ECR) plasma react...
- Author(s) : AYDIL E. S., GREGUS J. A., GOTTSCHO R. A.
- Date : 1993/12
- Languages : English
- Source: Rev. sci. Instrum. - vol. 64 - n. 12
View record
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Pellet injection technology.
- Author(s) : COMBS S. K.
- Date : 1993/07
- Languages : English
- Source: Rev. sci. Instrum. - vol. 64 - n. 7
View record
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SYSTEM FOR STUDYING LOW TEMPERATURE ADSORPTION ...
- Author(s) : ARKHAROV A. M.
- Date : 1982/03
- Languages : English
- Source: Instrum. exp. Tech. - vol. 25 - n. 2
View record
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A NEW METHOD FOR THE STUDY OF MAGNETIC DOMAINS ...
- Author(s) : PIOTROWSKI K., SZEWCZYK A., SZYMCZAK R.
- Date : 1983
- Languages : English
- Source: J. Magn. magn. Mater. - vol. 31 - n. 2
View record
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COMPACT, LOW-COST CRYOGENIC LASER HEAD.
- Author(s) : ECKARDT R. C.
- Date : 1984
- Languages : English
- Source: Rev. sci. Instrum. - vol. 55 - n. 12
View record