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The present and future of clean rooms.

[In Japanese. / En japonais.]

Author(s) : SUZUKI M.

Type of article: Article

Summary

The paper focusses on super clean rooms for semiconductors. Integration of semiconductor memory is being upgraded by four times every three years approximately. Stable microfabrication requires high cleanliness, and minimum allowable particle size has continued to become smaller as microfabrication levels become higher. To counterbalance increasing costs, mini-environments are now under discussion.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 1995-2492
  • Languages: Japanese
  • Source: Refrigeration - vol. 69 - n. 802
  • Publication date: 1994/08
  • Document available for consultation in the library of the IIR headquarters only.

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