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NOISE AND VIBRATION IN SEMICONDUCTOR CLEAN ROOMS.

Author(s) : ROSE T. H.

Summary

THE ADVERSE EFFECTS OF EQUIPMENT VIBRATION IN OCCUPIED STRUCTURES ARE PRIMARILY ANNOYANCE AND POSSIBLE DAMAGES. HOWEVER, CONTROL OF VIBRATION IN A SEMICONDUCTOR CLEAN ROOM IS EVEN MORE CRITICAL. THE LOCATION AND TYPE OF THE MECHANICAL EQUIPMENT AND THE STRUCTURAL CHARACTERISTICS OF THE FLOOR ARE AS IMPORTANT IN VIBRATION CONTROL AS ARE THE COMMON PRODUCTS USED IN CONTROLLING VIBRATION FROM MECHANICAL EQUIPMENT -VIBRATION ISOLATORS. THE EFFECT OF HIGH NOISE LEVELS ON EMPLOYEES' MORALE AND PRODUCTIVITY IS LIKEWISE WELL KNOWN, AND THERE ARE ACCEPTABLE CRITERIA. HIGH NOISE LEVELS CAN ALSO EXCESSIVELY VIBRATE THE SENSITIVE EQUIPMENT DIRECTLY THROUGH THE AIR.

Details

  • Original title: NOISE AND VIBRATION IN SEMICONDUCTOR CLEAN ROOMS.
  • Record ID : 1987-1125
  • Languages: English
  • Publication date: 1986
  • Source: Source: ASHRAE Trans.
    vol. 92; n. 1B; 289-298; 6 fig.
  • Document available for consultation in the library of the IIR headquarters only.

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