ShareParticle measurement technology.
[In Japanese. / En japonais.]
Author(s) : ICHIJO K.
Type of article: Article
Summary
Particle measurement in the air and liquid environments are necessary in the electronics industry which needs micro-fabrication technology. The principle and standards related to particle measurements are presented.
Details
- Original title: [In Japanese. / En japonais.]
- Record ID : 2009-0783
- Languages: Japanese
- Source: Refrigeration - vol. 83 - n. 973
- Publication date: 2008/11
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Indexing
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- Author(s) : WANG X. L., ZHANG Y. H., TAN Z. C.
- Date : 2005
- Languages : English
- Source: ASHRAE Transactions. 2005 Annual Meeting, Denver, Colorado, USA. Volume 111, part 2 + CD-ROM.
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- Date : 2004/01
- Languages : Spanish
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A technology of visualizing particles.
- Author(s) : SAKAMOTO K.
- Date : 2008/11
- Languages : Japanese
- Source: Refrigeration - vol. 83 - n. 973
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- Date : 1989/06
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- Source: J. chart. Inst. Build. Serv. - vol. 11 - n. 6
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- Author(s) : BERTIN D.
- Date : 2012/12
- Languages : French
- Source: Salles propres - n. 83
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