Piezo-resistive pressure sensor and its cryogenic use for pressure measurement of superfluid helium at magnet quench.

Summary

A commercially available silicon pressure sensor is investigated for use in situ pressure measurement in a pressurized superfluid helium environment (FPS51B sensor). The sensor was set in the specific cryostat which can provide a pressurized superfluid helium environment. Cryostat pressure was changed from 0 to about 170 kilopascals at superfluid helium temperature. The output voltage of the sensor changed linearly in proportion to the applied pressure change. Its performance was not changed after being subjected to several thermal cycles between 300 K and 2 K.

Details

  • Original title: Piezo-resistive pressure sensor and its cryogenic use for pressure measurement of superfluid helium at magnet quench.
  • Record ID : 2000-0577
  • Languages: English
  • Source: Cryogenics and refrigeration. Proceedings of ICCR '98.
  • Publication date: 1998/04/21
  • Document available for consultation in the library of the IIR headquarters only.

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