Share

IIR document

The measurement of local temperatures under micro jet impinging using HFE-7000.

Number: pap. TP-054

Author(s) : SHIN J. H., WANG Y., SONG C. H., et al.

Summary

Experiments were conducted to understand temperature distribution and measure local heat transfer coefficients under micro scale jet impinging using a refrigerant, HFE-7000 from 3MTM. The device used in the experiment was made of a 400 µm thick silicon wafer, a 500 µm thick Pyrex substrate, and a 250 µm thick vinyl sticker. On a silicon wafer, jet orifices were etched using deep reactive ion etching (DRIE). A heater and four 100 nm thick titanium resistance temperature detector (RTD) thermistors were fabricated on the Pyrex wafer. Between the Pyrex and silicon wafers, the vinyl sticker including a 1.9 mm × 14.8 mm × 0.25 mm micro channel was located to make them together. From the experiment, local temperatures from four RTDs were measured by heat fluxes at a flow rate, and local heat transfer coefficients were estimated to understand the characteristics of the jet impinging cooling.

Available documents

Format PDF

Pages: 7

Available

  • Public price

    20 €

  • Member price*

    Free

* Best rate depending on membership category (see the detailed benefits of individual and corporate memberships).

Details

  • Original title: The measurement of local temperatures under micro jet impinging using HFE-7000.
  • Record ID : 30021491
  • Languages: English
  • Source: 5th IIR Conference on Thermophysical Properties and Transfer Processes of Refrigerants.
  • Publication date: 2017/04/23
  • DOI: http://dx.doi.org/10.18462/iir.tptpr.2017.0054

Links


See other articles from the proceedings (84)
See the conference proceedings

Indexing