ShareCapacitance cell measurement of the out-of-plane expansion of thin films.
Author(s) : NIST, SNYDER C. R., MOPSIK F. I.
Type of monograph: Guide/Handbook, Booklet
Summary
The document provides guidance for construction and use of a capacitance-based technique for determining the coefficient of thermal expansion of films with thicknesses ranging from 2 micrometers up to 1 centimetre. The guide can be downloaded from the following Web site: www.nist.gov/practiceguides.
Details
- Original title: Capacitance cell measurement of the out-of-plane expansion of thin films.
- Record ID : 2004-0984
- Languages: English
- Subject: Regulation
- Publication: Us department of commerce, nist (national institute of standards and technology) - United states/United states
- Publication date: 2003
- Collection:
- Source: Source: NIST SP 960-7; 44 p. (15 x 23); fig.; 22 ref.; append.
- Document available for consultation in the library of the IIR headquarters only.
Indexing
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