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Distributed control system commissioning for a microelectronics factory.

Author(s) : NAUGHTON P. J.

Summary

The commissioning procedure developed must be flexible enough to allow for rapid changes in individual control loop requirements as the manufacturing process tools are commissioned. The transition from the simple commissioning procedures used in the past to the complex commissioning procedures needed for state-of-the-art distributed control systems has been difficult for many corporations. The commissioning of the distributed control system has proved especially difficult because of the higher level of technology involved and the added complexity of the commissioning procedure. The paper describes the type of distributed control system used and some of the methods used to commission a recently constructed microelectronics factory.

Details

  • Original title: Distributed control system commissioning for a microelectronics factory.
  • Record ID : 1993-2765
  • Languages: English
  • Source: ASHRAE Transactions 1992. Part 2.
  • Publication date: 1992
  • Document available for consultation in the library of the IIR headquarters only.

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