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CONTROL OF SEMICONDUCTOR MANUFACTURING CLEAN ROOMS.

Author(s) : ATKINSON G. V., MARTINO G. R.

Summary

MAINTAINING THE TEMPERATURE AND HUMIDITY AT THE SAME LEVELS DURING ALL STEPS OF THE MANUFACTURING PROCESS CONSIDERABLY IMPROVES < GOOD CHIP > YIELD PERCENTAGE. ELECTRONIC ANALOG CONTROLLERS, SENSORS, AND ACTUATORS HAVE BEEN SUCCESSFULLY APPLIED TO THESE CRITICAL CONTROL REQUIREMENTS IN BOTH NEW INSTALLATIONS AND THE RETROFIT OF EXISTING PNEUMATIC CONTROLS THE PAPER DISCUSSES THE SUCCESSFUL APPLICATION OF THESE CONTROL SYSTEMS AT SEVERAL SEMICONDUCTOR PLANT INSTALLATIONS. AREAS OF CAUTION ARE ADDRESSED AND INSTALLATION EXEN OE. THE PAPER INCLUDES SOME OBSERVATIONS AND RECOMMENDATIONS THAT WERE FOUND TO BE RELEVANT IN THE DESIGN AND INSTALLATION OF THESE SPECIALIZED CONTROL SYSTEMS.

Details

  • Original title: CONTROL OF SEMICONDUCTOR MANUFACTURING CLEAN ROOMS.
  • Record ID : 1990-2551
  • Languages: English
  • Publication date: 1989
  • Source: Source: ASHRAE Trans.
    vol. 95; n. 1; 477-482; 7 fig.; 8 ref.
  • Document available for consultation in the library of the IIR headquarters only.

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