Share

Development of a super nano clean room.

[In Japanese./ En japonais.]

Author(s) : HASEBE H., NAGOYA H., SUZUKI Y., et al.

Type of article: Article

Summary

The authors give an account on their research in the field of clean rooms in order to simultaneously control airborne contaminants and humidity.

Details

  • Original title: [In Japanese./ En japonais.]
  • Record ID : 2010-0568
  • Languages: Japanese
  • Source: SHASE - vol. 83 - n. 7
  • Publication date: 2009/07
  • Document available for consultation in the library of the IIR headquarters only.

Links


See the source

Indexing