Contamination control in case of door usage in clean room and verification of the effects.

[In Japanese. / En japonais.]

Author(s) : YAMAGUCHI T., YOSHIDA K., HASEGAWA M.

Type of article: Article

Summary

The authors present a new control method in response to door opening/closing in clean rooms.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 2009-0340
  • Languages: Japanese
  • Source: Transaction of the Society of Heating, Air-conditioning and Sanitary Engineers of Japan - n. 138
  • Publication date: 2008/09

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