DRY ROOM WITH A 223 K (-50 DEG C) DEW POINT ENVIRONMENT.
[In Japanese. / En japonais.]
Author(s) : SHIBATA Y., HOSOI K.
Type of article: Article
Summary
A VERY LOW DEW POINT MUST BE MAINTAINED IN ROOMS USED IN THE MANUFACTURE OF LITHIUM BATTERIES, AS WELL AS IN THOSE USED IN CERTAIN AREAS OF MEDICINE OR OF SEMICONDUCTOR MANUFACTURE. A ROOM IN WHICH THE DEW POINT IS MAINTAINED UNDER 263 K (-10 DEG C) IS CALLED < DRY ROOM > ; IT IS A DEHUMIDIFIER WHICH SUPPLIES SUCH LOW HUMIDITY. THE ARTICLE DESCRIBES THE AIR-CONDITIONING SYSTEM AND THE DEHUMIDIFIER, AND PRESENTS SOME EXAMPLES OF ACTUAL OPERATION.
Details
- Original title: [In Japanese. / En japonais.]
- Record ID : 1992-1853
- Languages: Japanese
- Source: SHASE - vol. 65 - n. 9
- Publication date: 1991
- Document available for consultation in the library of the IIR headquarters only.
Links
See other articles in this issue (3)
See the source
Indexing
-
The present and future of clean rooms.
- Author(s) : SUZUKI M.
- Date : 1994/08
- Languages : Japanese
- Source: Refrigeration - vol. 69 - n. 802
View record
-
CONTROL OF SEMICONDUCTOR MANUFACTURING CLEAN RO...
- Author(s) : ATKINSON G. V., MARTINO G. R.
- Date : 1989
- Languages : English
View record
-
HVAC SYSTEMS FOR SEMICONDUCTOR CLEAN ROOMS. 1. ...
- Author(s) : NAUGHTON P.
- Date : 1990
- Languages : English
View record
-
Datacom equipment power trends and cooling appl...
- Author(s) : ASHRAE
- Date : 2005
- Languages : English
View record
-
Système de climatisation pour centraux électron...
- Author(s) : MAATOUK I.
- Date : 1993/10
- Languages : French
- Source: Bull. ALME - 14-18; 2 fig.
View record