ShareEquipment for in situ resistivity and X-ray diffraction studies during ion implantation at temperatures between 4 and 1270 K.
Author(s) : KOENIGER A., HAMMERL C., ZANDER W., RAUSCHENBACH B., STRITZKER B.
Type of article: Article
Summary
An implanter end station with heatable helium-cryostat as a sample holder was built. The whole instrument has been successfully tested. Examples of carbon ion implantation in titanium and iron are given.
Details
- Original title: Equipment for in situ resistivity and X-ray diffraction studies during ion implantation at temperatures between 4 and 1270 K.
- Record ID : 1998-0729
- Languages: English
- Source: Rev. sci. Instrum. - vol. 67 - n. 11
- Publication date: 1996/11
- Document available for consultation in the library of the IIR headquarters only.
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