ShareEquipment for in situ resistivity and X-ray diffraction studies during ion implantation at temperatures between 4 and 1270 K.
Author(s) : KOENIGER A., HAMMERL C., ZANDER W., RAUSCHENBACH B., STRITZKER B.
Type of article: Article
Summary
An implanter end station with heatable helium-cryostat as a sample holder was built. The whole instrument has been successfully tested. Examples of carbon ion implantation in titanium and iron are given.
Details
- Original title: Equipment for in situ resistivity and X-ray diffraction studies during ion implantation at temperatures between 4 and 1270 K.
- Record ID : 1998-0729
- Languages: English
- Source: Rev. sci. Instrum. - vol. 67 - n. 11
- Publication date: 1996/11
- Document available for consultation in the library of the IIR headquarters only.
Links
See other articles in this issue (2)
See the source
-
SIMULTANEOUS MEASUREMENTS OF THERMOPOWER, THERM...
- Author(s) : CHAUSSY J., GUESSOUS A., MAZUER J.
- Date : 1981
- Languages : English
- Source: Rev. sci. Instrum. - vol. 52 - n. 11
View record
-
AN ESTIMATION OF SYSTEMATIC ERRORS IN THE PRESS...
- Author(s) : NARA K., TAMURA O.
- Date : 1985
- Languages : Japanese
- Source: Cryogenics/ Cryog. Eng. - vol. 20 - n. 4
View record
-
Thermal conductivity of some common cryostat ma...
- Author(s) : OLSON J. R.
- Date : 1993
- Languages : English
- Source: Cryogenics - vol. 33 - n. 7
View record
-
HELIUM 3 CRYOSTAT FOR MEASUREMENTS IN SUPERFLUI...
- Author(s) : SCHULZ U., TIDECKS R.
- Date : 1985
- Languages : English
- Source: Cryogenics - vol. 25 - n. 12
View record
-
VARIABLE-TEMPERATURE ACCESSORY FOR Q-BAND ESR M...
- Author(s) : DESFONDS G., RIUS G.
- Date : 1988
- Languages : English
- Source: Rev. sci. Instrum. - vol. 59 - n. 10
View record