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HVAC SYSTEMS FOR SEMICONDUCTOR CLEAN ROOMS. 1. SYSTEM COMPONENTS. 2. TOTAL SYSTEM DYNAMICS.

Author(s) : NAUGHTON P.

Summary

EXAMINING THE MAJOR ENERGY-USING COMPONENTS INVOLVED IN A CLASS 10 CLEAN ROOM DESIGN IS THE FOCUS OF PART 1 ; WHICH INCLUDES SUGGESTIONS FOR LOWER OPERATING COSTS WITH PROPER SELECTION OF HVAC COMPONENTS. IN PART 2, THE UNIQUE SYSTEM DYNAMICS OF 7 DIFFERENT SEMICONDUCTOR CLEAN ROOM DESIGNS ARE DEMONSTRATED. EACH SYSTEM IS ANALYZED FOR THE INTERACTION OF AIR AND WATER-SIDE DYNAMICS OF THE HVAC DESIGN. A SUMMARY OF OPERATING COSTS AND RECOMMENDATIONS FOR EFFICIENT SYSTEM OPERATING PROCEDURES ARE ALSO INCLUDED.

Details

  • Original title: HVAC SYSTEMS FOR SEMICONDUCTOR CLEAN ROOMS. 1. SYSTEM COMPONENTS. 2. TOTAL SYSTEM DYNAMICS.
  • Record ID : 1992-0777
  • Languages: English
  • Publication date: 1990
  • Source: Source: ASHRAE Trans.
    vol. 96; n. 2; 620-625; 7 fig.; 7 ref.; discuss.; 626-633; 7 fig.; 1 tabl.; 7 ref.; append.
  • Document available for consultation in the library of the IIR headquarters only.

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