ShareINDIUM THIN FILM THERMOMETER.
Author(s) : HARUYAMA T., SUZUKI T.
Type of article: Article
Summary
INDIUM THINFILM RESISTANCE THERMOMETERS ABOUT 1 MICROMETER THICK WERE FABRICATED, USING A MAGNETRON-SPUTTER METHOD, ON CERAMIC SUBSTRATES. THE THIN FILM WAS CUT SPIRALLY USING A FINE LASER BEAM TO ACHIEVE A RESISTANCE BETWEEN 100-500 OHM. SAMPLES WERE INVESTIGATED AT TEMPERATURES FROM 2 TO 300 K. THE DATA SHOW TYPICAL CHARACTERISTICS OF PURE METAL RESISTANCE THERMOMETERS DOWN TO 6 K. NEAR 6 K, HOWEVER, THE RESISTANCE DECREASED ABRUPTLY AND IN THE RANGE BETWEEN 6 TO 4.2 K, THE TEMPERATURE COEFFICIENT WAS FOUND TO BE 25,000 PPM/K.
Details
- Original title: INDIUM THIN FILM THERMOMETER.
- Record ID : 1991-2478
- Languages: English
- Source: Adv. cryog. Eng. - vol. 35 B
- Publication date: 1990
- Document available for consultation in the library of the IIR headquarters only.
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Indexing
- Themes: Thermodynamic measurements
- Keywords: Thermometer; Cryotemperature; Measurement; Thermometry; Indium
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