IIR document

On-line-analysis of high purity gases by mass spectrometry?


A survey conducted by Linde AG concerning the use of mass spectrometers for trace analyses of high purity gases from air separation units revealed that only a limited number of low resolution mass spectrometer types were applicable. Using certified test gases the efficiency of a quadrupole mass spectrometer was tested with respect to detection limit and cross sensitivity. The detection limit for most airborne impurities was shown to be in the range between 100 and 10 volume parts per billion. Due to cross sensitivities carbon monoxide, carbon dioxide and methane have considerably higher detection limits and have to be analysed by other detection methods, for example by infrared analysis. Nevertheless a concept was developed for on-line certification of the measured gas quality.

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  • Original title: On-line-analysis of high purity gases by mass spectrometry?
  • Record ID : 1998-0034
  • Languages: English
  • Source: MUST 1996. Meeting on Air Separation Technology
  • Publication date: 1996/10/10
  • Document available for consultation in the library of the IIR headquarters only.


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