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CLEAN ROOM AND PARTICLE DEPOSITS.

[In Japanese. / En japonais.]

Author(s) : FUJII S., XIE G.

Type of article: Article

Summary

DEPOSITSOF AEROSOL PARTICLES ON PRODUCT SURFACES IS A LARGE PROBLEM IN THE MANUFACTURING OF INTEGRATED CIRCUITS. THE DEVELOPMENT OF A MODEL FOR PREDICTING PARTICLE DEPOSITS IN UNIDIRECTIONAL CLEAN ROOMS IS DESCRIBED.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 1992-1856
  • Languages: Japanese
  • Source: SHASE - vol. 65 - n. 9
  • Publication date: 1991
  • Document available for consultation in the library of the IIR headquarters only.

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