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PRECISION CONTROL SYSTEM FOR AIR CONDITIONING IN SEMICONDUCTOR INDUSTRY.

[In Japanese. / En japonais.]

Author(s) : TOYODA N.

Type of article: Article

Summary

THE REPORT REFERS TO THE REQUIREMENTS OF THE PRECISION CONTROL SYSTEM AND THE SYSTEM ITSELF FOR THE UP-TO-DATE SEMICONDUCTOR INDUSTRY. IN THE PRECISION CONTROL SYSTEM, IT IS REQUIRED TO ELIMINATE DUST FROM AIR WITH PARTICLE SIZES LESS THAN 0.1 MICROMETER. TEMPERATURE ERROR IS ONLY ABOUT 0. 1 K AND THE CONTROL ACCURACY OF HUMIDITY IS ABOUT 2 TO 3% RH. WITH RESPECT TO THESE REQUIREMENTS, THE AUTHOR HAS DEVELOPED A THERMAL CLEAN CHAMBER OF CLEANLINESS CLASS 1 TO 10 WHICH PROVIDED A TEMPERATURE CHANGE WITHIN ABOUT 0.1 K AND A HUMIDITY CHANGE WITHIN ABOUT 2% RH. HE HAS REDUCED THE RUNNING COST BY THE ACHIEVEMENT OF ENERGY SAVING IN CONTRIVING A REFRIGERATION CYCLE OF THE AIR HANDLING UNIT CONTAINED IN THE CHAMBER.

Details

  • Original title: [In Japanese. / En japonais.]
  • Record ID : 1986-1637
  • Languages: Japanese
  • Source: Refrigeration - vol. 60 - n. 690
  • Publication date: 1985
  • Document available for consultation in the library of the IIR headquarters only.

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