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Removal of inorganic gas contaminants via the air washer of a make-up air unit in clean rooms.

Author(s) : SHIUE A., CHAO S. M., HU S. C.

Summary

AMCs generated in clean rooms can be removed by chemical filters on fan filter units, while outdoor air contaminants can be removed by chemical filters or air washers on make-up air units. However, chemical filters are expensive to set up and maintain. In this study, we set up a hydrophilic eliminator on an air washer to increase the gas-liquid contact surface, and incorporate an eliminator with smaller droplet spray nozzles to increase the removal efficiency of contaminants. The sources of chemical contaminants such as ammonia (NH3) and sulfur dioxide (SO2) were discharged upstream of the make-up air unit, and the removal efficiency downstream was evaluated. Experimental results show that when coupled with the hydrophilic eliminators, the air washer can increase SO2 removal efficiency up to 13.4% and utilizes fine water fog nozzles of about 65 micrometers to control the outlet concentration of NH3 effectively. Under the liquid gas ratio value 0.08, the removal efficiencies of sulfur dioxide and ammonia were 59.58 plus or minus 1.50% and 71.99 plus or minus 6.41%; for a liquid/gas ratio value 0.12, the removal efficiencies of sulfur dioxide and ammonia were 73.91 plus or minus 2.66% and 82.23 plus or minus 4.91%, respectively. Both efficiencies can be predicted by a theoretical model, which is also presented.

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Pages: pp. 167-172

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Details

  • Original title: Removal of inorganic gas contaminants via the air washer of a make-up air unit in clean rooms.
  • Record ID : 2010-0916
  • Languages: English
  • Source: ACRA-2009. The proceedings of the 4th Asian conference on refrigeration and air conditioning: May 20-22, 2009, Taipei, R.O.C.
  • Publication date: 2009/05/20

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