IIR document

Transfer and delivery of ultra pure helium.

Author(s) : GARY D.


The gas purity specification for micro-electronic industries applications are constantly increasing. From 1 ppm twenty years ago, it is now going down to less than 1 ppb for each component. The usual cryogenic purifiers have shown their limits. A new process including the purification of helium in liquid phase during its transfer from a 1100 US ISO container to a dedicated ultra clean vessel has shown its ability to reach these high quality specifications.

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Pages: 2004-1


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  • Original title: Transfer and delivery of ultra pure helium.
  • Record ID : 2005-1596
  • Languages: English
  • Source: Cryogenics 2004. Proceedings of the 8th Cryogenics Conference
  • Publication date: 2004/04/27


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