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A vertical/horizontal two-dimensional piezoelectric driven inertial slider micropositioner for cryogenic applications.

Author(s) : BLACKFORD B. L., JERICHO M. H., BOUDREAU M. G.

Type of article: Article

Summary

The motion of the slider car occurs with respect to a quartz rod which is attached to, and accelerated by the piezo tube. The vertical motion, against or with gravity, is achieved by activating the longitudinal mode of the piezo tube. The horizontal motion is a rotation about the quartz rod, achieved by activating the bending mode of the piezo tube. A computer simulation model of the inertial slider process has been developed also, to investigate the effectiveness of various activating waveforms. It confirms the advantage of a cycloidal-like waveform recently reported in the literature. A diagram of the analog circuit developed to produce a cycloidal-like waveform to drive the piezoelectric is included. The authors briefly describe an alternative design where the activating piezoelectric is attached to the slider car which moves vertically on a fixed quartz rod.

Details

  • Original title: A vertical/horizontal two-dimensional piezoelectric driven inertial slider micropositioner for cryogenic applications.
  • Record ID : 1993-1214
  • Languages: English
  • Source: Rev. sci. Instrum. - vol. 63 - n. 4 (I)
  • Publication date: 1992/04
  • Document available for consultation in the library of the IIR headquarters only.

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