ShareEnergy saving in clean rooms.
[In Japanese. / En japonais.]
Author(s) : YAMADA T.
Type of article: Article
Summary
In the semiconductor industry where, the most advanced industrial clean rooms are operated, the reduction of energy consumption of system equipment, carrier systems and production devices is being studied, and the recovery of energy and energy saving technology are also under consideration.
Details
- Original title: [In Japanese. / En japonais.]
- Record ID : 1997-1786
- Languages: Japanese
- Source: SHASE - vol. 70 - n. 6
- Publication date: 1996/06
- Document available for consultation in the library of the IIR headquarters only.
Links
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