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A new gas purifier for argon-fluorine excimer lasers.

Author(s) : ITO S., SAITO T., TADA A.

Type of article: Article

Summary

The authors have developed a new gas purifier for argon-fluorine excimer lasers that can remove all the impurities from degraded argon-fluorine excimer laser gas. They found that cooled activated charcoal at temperatures below -50 deg C effectively remotes tetrafluorocarbon, which is the preponderant impurity generated in argon-fluorine excimer laser gas mixtures. They also demonstrated that the new gas purifier can regenerate the argon-fluorine excimer laser gas up to its initial purity level after about 1 billion shots of operation.

Details

  • Original title: A new gas purifier for argon-fluorine excimer lasers.
  • Record ID : 1997-0662
  • Languages: English
  • Source: Rev. sci. Instrum. - vol. 67 - n. 3
  • Publication date: 1996/03
  • Document available for consultation in the library of the IIR headquarters only.

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