ShareApplication of a 3C duct design method in semiconductor factory process exhaust systems.
Author(s) : CHEN W. L., TING C. C., SHIU H. R., et al.
Summary
The paper presents a method of calculation for ducts which are used to evacuate special gases and chemicals involved in semiconductor refrigeration processes. These products are more and more harmful to human health and the exhaust duct system must be carefully designed.
Details
- Original title: Application of a 3C duct design method in semiconductor factory process exhaust systems.
- Record ID : 2003-0461
- Languages: English
- Source: ASHRAE Transactions. 2002 Winter Meeting, Atlantic City, New Jersey. Volume 108, part 1 + CD-ROM.
- Publication date: 2002
- Document available for consultation in the library of the IIR headquarters only.
Links
See other articles from the proceedings (73)
See the conference proceedings
Indexing
- Themes: Other industrial applications
- Keywords: Gas; Semiconductor; Manufacture; Ventilation; Design; Cooling; Chemical; Process; Duct
-
A new approach to turbine inlet air cooling.
- Author(s) : GUIMARÃES E. T.
- Date : 2001
- Languages : English
- Source: ASHRAE Transactions. 2001 Winter Meeting, Atlanta, GA. Volume 107, part 1 + CD-ROM.
View record
-
Dynamic cooling of a semiconductor by a contact...
- Author(s) : LIPNICKI Z., KRÓL F.
- Date : 2005/07
- Languages : English
- Source: International Journal of Heat and Mass Transfer - vol. 48 - n. 14
View record
-
Energy saving in ceramic tile kilns: cooling ga...
- Author(s) : MEZQUITA A., BOIX J., MONFORT E., et al.
- Date : 2014/04
- Languages : English
- Source: Applied Thermal Engineering - vol. 65 - n. 1-2
View record
-
Treatment of iron alloys below 0 deg C.
- Author(s) : FIORI A.
- Date : 1994/01
- Languages : Spanish
- Source: Téc. Frio - vol. 43 - n. 451
View record
-
Ventilation in enclosed cold rolling workshops.
- Author(s) : WANG Y., XIAO P.
- Date : 2001/06
- Languages : Chinese
- Source: HV & AC - vol. 31 - n. 140
View record