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Fabrication of germanium-gold film thermometers using interfacial atomic diffusion.

Author(s) : ZHU D. M., LIN F.

Type of article: Article

Summary

The thermometers were made of multiple germanium-gold layers. In situ resistance measurements during the fabrication process indicate that gold and germanium atoms were diffused into neighboring layers. When the deposited gold layer thickness in a multilayer film is between 8 and 10 angströms, the resistance of the film shows a power law behaviour over a wide temperature range. As the gold layer thickness increases to beyond 10 angströms, the resistance of the film becomes less sensitive to temperature. Both the temperature dependence and the magnitude of the film resistance are consistent with results obtained in germanium-gold alloys.

Details

  • Original title: Fabrication of germanium-gold film thermometers using interfacial atomic diffusion.
  • Record ID : 1994-2176
  • Languages: English
  • Source: Rev. sci. Instrum. - vol. 64 - n. 9
  • Publication date: 1993/09
  • Document available for consultation in the library of the IIR headquarters only.

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