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HVAC MODIFICATIONS FOR SEMICONDUCTOR FABRICATION.

Author(s) : MANDELBAUM I.

Type of article: Article

Summary

MAINTENANCE OF CLOSE CONDITIONS WITH LOW HUMIDITY CAN BE VERY WASTEFUL OF ENERGY. THE REVISED CONTROL METHOD DESCRIBED HERE PAID BACK COSTS OF THE EQUIPMENT CHANGES IN A FEW MONTHS. A.R.T.

Details

  • Original title: HVAC MODIFICATIONS FOR SEMICONDUCTOR FABRICATION.
  • Record ID : 1991-2725
  • Languages: English
  • Source: Heat. Pip. Air Cond. - vol. 63 - n. 3
  • Publication date: 1991/03
  • Document available for consultation in the library of the IIR headquarters only.

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