ShareHVAC MODIFICATIONS FOR SEMICONDUCTOR FABRICATION.
Author(s) : MANDELBAUM I.
Type of article: Article
Summary
MAINTENANCE OF CLOSE CONDITIONS WITH LOW HUMIDITY CAN BE VERY WASTEFUL OF ENERGY. THE REVISED CONTROL METHOD DESCRIBED HERE PAID BACK COSTS OF THE EQUIPMENT CHANGES IN A FEW MONTHS. A.R.T.
Details
- Original title: HVAC MODIFICATIONS FOR SEMICONDUCTOR FABRICATION.
- Record ID : 1991-2725
- Languages: English
- Source: Heat. Pip. Air Cond. - vol. 63 - n. 3
- Publication date: 1991/03
- Document available for consultation in the library of the IIR headquarters only.
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Indexing
- Themes: Air conditioning in laboratories and industry
- Keywords: Electronics; Air conditioning
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- Date : 1990
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CLEAN ROOMS: A USER'S VIEW.
- Author(s) : LAMBERT R. D.
- Date : 1986/01/29
- Languages : English
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- Author(s) : GUICCIARDI F.
- Date : 1990/03
- Languages : Italian
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- Date : 1989
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