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Production of ultrahigh purity nitrogen free of light impurities.
Author(s) : AGRAWAL R.
Summary
The demand to decrease the level of impurities in nitrogen used by the electronic industry is ever increasing. Besides decreasing the concentration of oxygen and argon in nitrogen to parts per billion (ppb)levels, it is required that more volatile impurities such as hydrogen also be at ppb levels. Distillation schemes have been suggested. However, extra pressure energy is used to produce nitrogen by these processes. In the paper a method is described to coproduce a substantial fraction of total nitrogen which is extremely lean in more volatile impurities and is still at the same pressure as the main distillation column. Additional energy is not required by this process and this leads to an overall higher efficiency of nitrogen production.
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Details
- Original title: Production of ultrahigh purity nitrogen free of light impurities.
- Record ID : 1998-0048
- Languages: English
- Source: MUST 1996. Meeting on Air Separation Technology
- Publication date: 1996/10/10
- Document available for consultation in the library of the IIR headquarters only.
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